TOKYO -- Rigaku Corporation, a global solution partner in X-ray analytical systems and a group company of Rigaku Holdings Corporation (headquarters: Akishima, Tokyo; CEO: Jun Kawakami; “Rigaku”), announced the expansion of its development of metrology technologies for next-generation semiconductors, leveraging global research environments.

As part of this initiative, Rigaku is working with imec, a world-leading semiconductor research and innovation hub headquartered in Belgium, under a three-year development program. Through this effort, Rigaku will advance its core X-ray technologies, including 3D device metrology, high-sensitivity detection of ultrathin films and trace elements, and non-destructive inspection of microscopic defects.

As semiconductor devices evolve toward advanced architectures such as Gate-All-Around (GAA) and Complementary FET (CFET)[1], along with increasing memory density, manufacturing processes are becoming more complex. These drives growing demand for highly accurate, non-destructive measurement and inspection technologies to support stable mass production. Rigaku addresses these needs by delivering high-value, differentiated metrology and inspection solutions.